This study identifies critical aspects in the design of a modern information system aimed at the production management of industrial and government R&D cleanroom laboratories. We analyze the differences between competing technologies for microsystems fabrication, such as CMOS modified by micromachining steps. Our analysis covers both the technical and organizational perspective and identify new functions not included in traditional semiconductor CAM
CAM for Microsystems: managing the evolution from planar CMOS to MEMS
Ferrario, Lorenza;
2002-01-01
Abstract
This study identifies critical aspects in the design of a modern information system aimed at the production management of industrial and government R&D cleanroom laboratories. We analyze the differences between competing technologies for microsystems fabrication, such as CMOS modified by micromachining steps. Our analysis covers both the technical and organizational perspective and identify new functions not included in traditional semiconductor CAMFile in questo prodotto:
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