There is an increasing interest of space industries towards the MEMS devices, which already found several applications in other sectors. The potential benefits from the use of those devices are good electrical performances, power savings, small size. This article describes a silicon technology used for the development of MEMS RF switches. The choice of a well established technology helps maintaining competitive manufacturing costs. The electrical and mechanical designs make use of FDTD / TLM and ANSYS simulation tools respectively. The test results of the first wafer run are also presented
A Silicon Based MEMS Technology for Electro-statically Actuated SPDT RF Switches
Armaroli, Cristiana;Ferrario, Lorenza;Giacomozzi, Flavio;Lorenzelli, Leandro;Margesin, Benno;Rangra, Kamaljit;
2002-01-01
Abstract
There is an increasing interest of space industries towards the MEMS devices, which already found several applications in other sectors. The potential benefits from the use of those devices are good electrical performances, power savings, small size. This article describes a silicon technology used for the development of MEMS RF switches. The choice of a well established technology helps maintaining competitive manufacturing costs. The electrical and mechanical designs make use of FDTD / TLM and ANSYS simulation tools respectively. The test results of the first wafer run are also presentedFile in questo prodotto:
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