Polysilicon microheaters able to produce a temperature gradiente have been designed, simulated, fabricated by using bulk micromachining techniques and experimentally tested. These innovative devices allow the employment of an array of multisensors whose selectivity depends on the operating temperature. The heater, made up of four different series resistances, is embedded in a SiO2/Si3N4 multilayer system, freestanding as a membrane after the bulk-Si wet etch in TMAH 25wt% AT 90°C. Experimental results show a temperature of 200°C at the hottest point with 60 mW power supply

Micromachined microheater for the generation of a temperature gradient

Tibuzzi, Arianna;Soncini, Giovanni;Zen, Mario;Guarnieri, Vittorio;Margesin, Benno;
2002

Abstract

Polysilicon microheaters able to produce a temperature gradiente have been designed, simulated, fabricated by using bulk micromachining techniques and experimentally tested. These innovative devices allow the employment of an array of multisensors whose selectivity depends on the operating temperature. The heater, made up of four different series resistances, is embedded in a SiO2/Si3N4 multilayer system, freestanding as a membrane after the bulk-Si wet etch in TMAH 25wt% AT 90°C. Experimental results show a temperature of 200°C at the hottest point with 60 mW power supply
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/543
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