We present a physically-based and multi-energy domain coupled reduced-order model that allows for the predictive simulation of the dynamic response of RF-MEMS switches. The coupling effects occurring during dynamic operation, namely increased damping due to the decreasing gap height and electrostatic spring softening are correctly implemented in the model and, therefore, accurately reproduced. The model is able to account for varying ambient pressure conditions and shows good agreement with measurements at pressure levels from 200hPa to 960hPa.
Verification of a nonlinear model of a viscously damped ohmic RF-MEMS switch at varying ambient pressure conditions
Iannacci, Jacopo
2009-01-01
Abstract
We present a physically-based and multi-energy domain coupled reduced-order model that allows for the predictive simulation of the dynamic response of RF-MEMS switches. The coupling effects occurring during dynamic operation, namely increased damping due to the decreasing gap height and electrostatic spring softening are correctly implemented in the model and, therefore, accurately reproduced. The model is able to account for varying ambient pressure conditions and shows good agreement with measurements at pressure levels from 200hPa to 960hPa.File in questo prodotto:
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