The paper reports about the technology platform for the fabrication of RF-MEMS devices developed at FBK. The most important process features, requirements and possible applications are presented and described. The basic fabrication process, together with some of the more important process variations and its capabilities are reported. Finally, some examples of produced devices and their performances are briefly presented.
A Flexible Technology Platform for the Fabrication of RF-MEMS Devices
Giacomozzi, Flavio;Mulloni, Viviana;Colpo, Sabrina;Iannacci, Jacopo;Margesin, Benno;Faes, Alessandro
2011-01-01
Abstract
The paper reports about the technology platform for the fabrication of RF-MEMS devices developed at FBK. The most important process features, requirements and possible applications are presented and described. The basic fabrication process, together with some of the more important process variations and its capabilities are reported. Finally, some examples of produced devices and their performances are briefly presented.File in questo prodotto:
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