This work presents the design and fabrication of novel piezoelectric polymer-FET tactile sensing devices to be plased on humanoid robots e.g. on fingertips. With thin piezoelectric polymers (PVDF-TrFE) film directly spun and processed in situ on the gate area of a MOS transistor, the device can also be called as POSFET (Piezoelectric Oxide Semiconductor Field Effect Transistor) tactile sensor. Challenging issues like in situ poling of piezoelectric polymer film, without damaging or altering the characteristics of underlying MOS devices, have been successfully dealt with.
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