The influence of continuous actuation stress on the reliability of dielectric-less ohmic RF-MEMS cantilever-based switches was investigated in this work. Comparing different designs, the changing of the main electrical parameters during the stress were attributed to substrate charging phenomena, leading to both narrowing and shifting of traditional hysteresis-like curves. Recovery procedures were also analyzed.
Impact of Continuous Actuation on the Reliability of Dielectric-less Ohmic RF-MEMS Switches
Solazzi, Francesco;Iannacci, Jacopo;Giacomozzi, Flavio;Margesin, Benno;
2009-01-01
Abstract
The influence of continuous actuation stress on the reliability of dielectric-less ohmic RF-MEMS cantilever-based switches was investigated in this work. Comparing different designs, the changing of the main electrical parameters during the stress were attributed to substrate charging phenomena, leading to both narrowing and shifting of traditional hysteresis-like curves. Recovery procedures were also analyzed.File in questo prodotto:
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