This paper presents an approach in modeling RF MEMS switches based on FEM simulations performed by means of ANSYSTM software. A two-steps simulation procedure will be introduced, consisting of a structural analysis involving contact elements and a coupled-domains analysis aiming at evaluating the combined effect of pressure, voltage and temperature. The key steps useful to perform both the kind of simulation will be highlighted.
Contact Modeling of RF MEMS Switches Based On FEM Simulations
Solazzi, Francesco;Repchankova, Alena;Iannacci, Jacopo;Faes, Alessandro;Margesin, Benno
2009-01-01
Abstract
This paper presents an approach in modeling RF MEMS switches based on FEM simulations performed by means of ANSYSTM software. A two-steps simulation procedure will be introduced, consisting of a structural analysis involving contact elements and a coupled-domains analysis aiming at evaluating the combined effect of pressure, voltage and temperature. The key steps useful to perform both the kind of simulation will be highlighted.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
