This paper presents an approach in modeling RF MEMS switches based on FEM simulations performed by means of ANSYSTM software. A two-steps simulation procedure will be introduced, consisting of a structural analysis involving contact elements and a coupled-domains analysis aiming at evaluating the combined effect of pressure, voltage and temperature. The key steps useful to perform both the kind of simulation will be highlighted.

Contact Modeling of RF MEMS Switches Based On FEM Simulations

Solazzi, Francesco;Repchankova, Alena;Iannacci, Jacopo;Faes, Alessandro;Margesin, Benno
2009

Abstract

This paper presents an approach in modeling RF MEMS switches based on FEM simulations performed by means of ANSYSTM software. A two-steps simulation procedure will be introduced, consisting of a structural analysis involving contact elements and a coupled-domains analysis aiming at evaluating the combined effect of pressure, voltage and temperature. The key steps useful to perform both the kind of simulation will be highlighted.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11582/4905
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