Mesoscopic polysilicon wires have been fabricated by surface micromachining techniques and employed as high resistivity Hydrogen sensors prototypes; experimental measurements in a flux of 100 ppm have been performed. Wires local thermal oxidation by laser annealing has been obtained in order to fourthly reduce wire dimensions.

High Surface/Volume Ratio Mesoscopic Polysilicon Wires for Sensing Applications

Tibuzzi, Arianna;Margesin, Benno;Zen, Mario;Soncini, Giovanni;
2001

Abstract

Mesoscopic polysilicon wires have been fabricated by surface micromachining techniques and employed as high resistivity Hydrogen sensors prototypes; experimental measurements in a flux of 100 ppm have been performed. Wires local thermal oxidation by laser annealing has been obtained in order to fourthly reduce wire dimensions.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/489
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