Mesoscopic polysilicon wires have been fabricated by surface micromachining techniques and employed as high resistivity Hydrogen sensors prototypes; experimental measurements in a flux of 100 ppm have been performed. Wires local thermal oxidation by laser annealing has been obtained in order to fourthly reduce wire dimensions.
High Surface/Volume Ratio Mesoscopic Polysilicon Wires for Sensing Applications
Tibuzzi, Arianna;Margesin, Benno;Zen, Mario;Soncini, Giovanni;
2001-01-01
Abstract
Mesoscopic polysilicon wires have been fabricated by surface micromachining techniques and employed as high resistivity Hydrogen sensors prototypes; experimental measurements in a flux of 100 ppm have been performed. Wires local thermal oxidation by laser annealing has been obtained in order to fourthly reduce wire dimensions.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
