The adoption of ESD events to systematically induce micro-welding formation on ohmic RF-MEMS switches is proposed. The established procedure for accelerated testing was verified with success on electrostatically actuated micro-machined switches having different topologies, and it was used to assess the efficiency of a heat-based active restoring mechanism.
|Titolo:||A Positive Exploitation of ESD Events: Micro-welding Induction on Ohmic MEMS Contacts|
|Data di pubblicazione:||2011|
|Appare nelle tipologie:||4.1 Contributo in Atti di convegno|