The adoption of ESD events to systematically induce micro-welding formation on ohmic RF-MEMS switches is proposed. The established procedure for accelerated testing was verified with success on electrostatically actuated micro-machined switches having different topologies, and it was used to assess the efficiency of a heat-based active restoring mechanism.

A Positive Exploitation of ESD Events: Micro-welding Induction on Ohmic MEMS Contacts

Iannacci, Jacopo;
2011

Abstract

The adoption of ESD events to systematically induce micro-welding formation on ohmic RF-MEMS switches is proposed. The established procedure for accelerated testing was verified with success on electrostatically actuated micro-machined switches having different topologies, and it was used to assess the efficiency of a heat-based active restoring mechanism.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/48180
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