Accurate modelling of the electromechanical behaviour of RF-MEMS devices is critical in order to predict their characteristics, and consequently how the design has to be optimized in order to overcome the trade-offs arising when dealing with specifications both in the mechanical and electrical/electromagnetic physical domains. In this work we present a complete approach to the simulation of RF-MEMS devices based on FEM (Finite Element Method) simulations performed in ANSYSTM Multiphysics.

FEM Electromechanical Modelling of a MEMS Variable Capacitor for RF Applications

Iannacci, Jacopo;Repchankova, Alena;Margesin, Benno
2009

Abstract

Accurate modelling of the electromechanical behaviour of RF-MEMS devices is critical in order to predict their characteristics, and consequently how the design has to be optimized in order to overcome the trade-offs arising when dealing with specifications both in the mechanical and electrical/electromagnetic physical domains. In this work we present a complete approach to the simulation of RF-MEMS devices based on FEM (Finite Element Method) simulations performed in ANSYSTM Multiphysics.
9783981099355
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11582/4709
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