In this paper, the design of a capacitive RF-MEMS switch is presented. In order to have precise control of the downstate capacitance value a floating metal technique is used. As RF MEMS switches represents new design challenges, electrical modelling is addressed with 2.5D and 3D full wave electromagnetic software. More specifically, ADS-momentum (2.5D) and EMDS (3D) from Agilent Technologies are used. The switch was fabricated at FBK-IRST foundry in Trento, Italy. Characterization and simulation results are compared and conclusions are extracted. The designed capacitive switch presents a maximum isolation of 38 dB at 15 Ghz

Diseño de dispositivos micro-conmutadores RF-MEMS capacitivos con metalizacion flotante

Giacomozzi, Flavio;
2008

Abstract

In this paper, the design of a capacitive RF-MEMS switch is presented. In order to have precise control of the downstate capacitance value a floating metal technique is used. As RF MEMS switches represents new design challenges, electrical modelling is addressed with 2.5D and 3D full wave electromagnetic software. More specifically, ADS-momentum (2.5D) and EMDS (3D) from Agilent Technologies are used. The switch was fabricated at FBK-IRST foundry in Trento, Italy. Characterization and simulation results are compared and conclusions are extracted. The designed capacitive switch presents a maximum isolation of 38 dB at 15 Ghz
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/4358
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