A new configuration of a double folded double slot CPW feed micromachined antenna array was realized on a 1.5 um thin three-layer dielectric membrane fabricated on a silicon substrate. The antenna was designed for an operating frequency of 38 GHz, and the double folded configuration was used for minimizing the membrane extension

38 GHz Antennas on Micromachined Silicon Substrates

Giacomozzi, Flavio;
2001

Abstract

A new configuration of a double folded double slot CPW feed micromachined antenna array was realized on a 1.5 um thin three-layer dielectric membrane fabricated on a silicon substrate. The antenna was designed for an operating frequency of 38 GHz, and the double folded configuration was used for minimizing the membrane extension
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11582/413
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