The paper investigates the actuation mechanism in floating electrode MEMS capacitive switches. It is demonstrated that in the pull-in state the device operation turns from voltage to current controlled actuation. The current arises from Poole-Frenkel mechanism in the dielectric film and Fowler-Nordheim in the bridge-floating electrode air gap. The pull-out voltage seems to arise from the abrupt decrease of Fowler-Nordheim electric field intensity. This mechanism seems to be responsible for the very small difference with respect to the pull-in voltage.

Floating electrode microelectromechanical system capacitive switches: A different actuation mechanism

Colpo, Sabrina;Giacomozzi, Flavio;Margesin, Benno
2011

Abstract

The paper investigates the actuation mechanism in floating electrode MEMS capacitive switches. It is demonstrated that in the pull-in state the device operation turns from voltage to current controlled actuation. The current arises from Poole-Frenkel mechanism in the dielectric film and Fowler-Nordheim in the bridge-floating electrode air gap. The pull-out voltage seems to arise from the abrupt decrease of Fowler-Nordheim electric field intensity. This mechanism seems to be responsible for the very small difference with respect to the pull-in voltage.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/40193
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