Design, realisation and testing results of an integrated air flow sensor based on micromachined technology are reported. The mass airflow sensor architecture is based on a dedicated microlelectronic thermal (hot-wire) anemometer design. Two different layouts for the two different splittings projected one for a polysilicon resistor and the other one for a gold resistor has been implemented. This device has a very small sensor size, with a low power consumption, a good accuracy, a very low signal-to-noise ratio, an excellent frequency response, a simultaneous fluid temperature measurement and a low fabrication cost. We realised a micro air flow sensor prototype, fabricated with MEMS technologies. Electro-mechanical tests have been carried out thus demonstrating the high performance of the device.

Micromachined flow sensor on silicon membrane

Guarnieri, Vittorio;Decarli, Massimiliano;Bagolini, Alvise;Zen, Mario;Soncini, Giovanni
2003

Abstract

Design, realisation and testing results of an integrated air flow sensor based on micromachined technology are reported. The mass airflow sensor architecture is based on a dedicated microlelectronic thermal (hot-wire) anemometer design. Two different layouts for the two different splittings projected one for a polysilicon resistor and the other one for a gold resistor has been implemented. This device has a very small sensor size, with a low power consumption, a good accuracy, a very low signal-to-noise ratio, an excellent frequency response, a simultaneous fluid temperature measurement and a low fabrication cost. We realised a micro air flow sensor prototype, fabricated with MEMS technologies. Electro-mechanical tests have been carried out thus demonstrating the high performance of the device.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/3876
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