Design, realisation and testing results of an integrated air flow sensor based on micromachined technology are reported. The mass airflow sensor architecture is based on a dedicated microlelectronic thermal (hot-wire) anemometer design. Two different layouts for the two different splittings projected one for a polysilicon resistor and the other one for a gold resistor has been implemented. This device has a very small sensor size, with a low power consumption, a good accuracy, a very low signal-to-noise ratio, an excellent frequency response, a simultaneous fluid temperature measurement and a low fabrication cost. We realised a micro air flow sensor prototype, fabricated with MEMS technologies. Electro-mechanical tests have been carried out thus demonstrating the high performance of the device.
Micromachined flow sensor on silicon membrane
Guarnieri, Vittorio;Decarli, Massimiliano;Bagolini, Alvise;Zen, Mario;Soncini, Giovanni
2003-01-01
Abstract
Design, realisation and testing results of an integrated air flow sensor based on micromachined technology are reported. The mass airflow sensor architecture is based on a dedicated microlelectronic thermal (hot-wire) anemometer design. Two different layouts for the two different splittings projected one for a polysilicon resistor and the other one for a gold resistor has been implemented. This device has a very small sensor size, with a low power consumption, a good accuracy, a very low signal-to-noise ratio, an excellent frequency response, a simultaneous fluid temperature measurement and a low fabrication cost. We realised a micro air flow sensor prototype, fabricated with MEMS technologies. Electro-mechanical tests have been carried out thus demonstrating the high performance of the device.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
