This work reports the analysis, modeling and characterization of an electrostatic vibration-to-electric energy scavenger. The scavenger was manufactured by the FBK in-house foundry by using a MEMS (Micro-Electro- Mechanical System) surface micro-machining technology. Extensive finite element analyses (FEA) were performed for the compact modeling of the device and presented here. The scavenger was characterized by means of dynamical measurements as a further validation of the FE model. A random vibration analysis is also utilized for the emulation of the real device operating conditions.
|Titolo:||Modeling and characterization of a circular-shaped energy scavenger in MEMS surface micromachining technology|
|Data di pubblicazione:||2011|
|Appare nelle tipologie:||4.1 Contributo in Atti di convegno|