This work reports the analysis, modeling and characterization of an electrostatic vibration-to-electric energy scavenger. The scavenger was manufactured by the FBK in-house foundry by using a MEMS (Micro-Electro- Mechanical System) surface micro-machining technology. Extensive finite element analyses (FEA) were performed for the compact modeling of the device and presented here. The scavenger was characterized by means of dynamical measurements as a further validation of the FE model. A random vibration analysis is also utilized for the emulation of the real device operating conditions.
Modeling and characterization of a circular-shaped energy scavenger in MEMS surface micromachining technology
Solazzi, Francesco;Iannacci, Jacopo;Faes, Alessandro;Giacomozzi, Flavio;Margesin, Benno;
2011-01-01
Abstract
This work reports the analysis, modeling and characterization of an electrostatic vibration-to-electric energy scavenger. The scavenger was manufactured by the FBK in-house foundry by using a MEMS (Micro-Electro- Mechanical System) surface micro-machining technology. Extensive finite element analyses (FEA) were performed for the compact modeling of the device and presented here. The scavenger was characterized by means of dynamical measurements as a further validation of the FE model. A random vibration analysis is also utilized for the emulation of the real device operating conditions.File in questo prodotto:
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