This work presents the modeling, design and fabrication of silicon micro-cantilevers arrays, suitable for combinatorial analysis of thin-film materials. Micro-cantilevers realized by bulk micromachining technology have been proposed for on-line evaluations of the residual stress and Young’s Modulus of thin-films during the deposition procedure by monitoring the beam bending with an integrated piezoresistors-based read-out system.

MEMS-based Silicon Cantilevers Arrays for combinatorial analysis of thin-film materials

Decarli, Massimiliano;Adami, Andrea;Lorenzelli, Leandro;Bensaada Laidani, Nadhira
2006

Abstract

This work presents the modeling, design and fabrication of silicon micro-cantilevers arrays, suitable for combinatorial analysis of thin-film materials. Micro-cantilevers realized by bulk micromachining technology have been proposed for on-line evaluations of the residual stress and Young’s Modulus of thin-films during the deposition procedure by monitoring the beam bending with an integrated piezoresistors-based read-out system.
9789163192814
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11582/3678
 Attenzione

Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte dell'ateneo

Citazioni
  • ???jsp.display-item.citation.pmc??? ND
social impact