This work presents the modeling, design and fabrication of silicon micro-cantilevers arrays, suitable for combinatorial analysis of thin-film materials. Micro-cantilevers realized by bulk micromachining technology have been proposed for on-line evaluations of the residual stress and Young’s Modulus of thin-films during the deposition procedure by monitoring the beam bending with an integrated piezoresistors-based read-out system.
MEMS-based Silicon Cantilevers Arrays for combinatorial analysis of thin-film materials
Decarli, Massimiliano;Adami, Andrea;Lorenzelli, Leandro;Bensaada Laidani, Nadhira
2006-01-01
Abstract
This work presents the modeling, design and fabrication of silicon micro-cantilevers arrays, suitable for combinatorial analysis of thin-film materials. Micro-cantilevers realized by bulk micromachining technology have been proposed for on-line evaluations of the residual stress and Young’s Modulus of thin-films during the deposition procedure by monitoring the beam bending with an integrated piezoresistors-based read-out system.File in questo prodotto:
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