SOLID-STATE GAS SENSOR AND CORRESPONDING MANUFACTURING METHOD

A solid-state gas sensor (10) includes a semiconductor chip (12), which in turn includes an element sensitive to the presence of one or more gaseous species. The sensor includes a support (13) on which the semiconductor chip is mounted. The support (13) has electrical connection pads (14A, 14B, 14C, 14D) connected to respective electrodes of the semiconductor chip and accessible from outside the sensor via respective electrical connection terminals (16A, 16B, 16C, 16D). The sensor includes a closure element (18) mounted on the support (13) to define a sensing chamber at the upper surface of the semiconductor chip (12). The closure element (18) has one or more through holes to allow gas exchange between the sensing chamber and the external environment. The sensor includes a selective membrane arranged internally in the closure element (18) between the upper surface of the semiconductor chip (12) and the through holes. The selective membrane includes cellulose nanocrystals.