Development of a true 14.8um pixel resolution intraoral sensors for dental x-ray imaging

We exploit the development of a direct conversion intraoral sensor (IOS) utilizing a novel material, Perovskite (PV), employing a CMOS (Complementary metal-oxide-semiconductor) readout array with a pixel pitch of 14.8um for dental x-ray imaging. A 100um-thick Perovskite film was fabricated onto a CMOS readout array using a powder-based LTVAC (low-temperature and vacuum-assisted crystallization) process developed in this study. Fundamental x-ray imaging characteristics were assessed in terms of MTF (modulation transfer function) and DQE (detective quantum efficiency) and compared with a CsI-based commercial IOS using sample images under dental x-ray spectrum. The developed PV-based IOS demonstrated >20% MTF at the 33.8 lp/mm Nyquist frequency of 14.8um pixel device and superior DQE performance above a spatial frequency of 9 lp/mm, offering enhanced x-ray imaging capabilities compared to CsI-based indirect conversion commercial IOS products.