Transistor-based Flexible Touch Sensors

This article introduces transistor-based tactile sensing devices. In particular, the piezoelectric oxide semiconductor field effect transistor (POSFET)-based tactile sensing devices are introduced. The-state-of-the-art integration of piezoelectric materials on silicon (Si)-based MOSFETs provides the opportunities of detecting dynamic forces. Further, by using chip thinning technologies, it is possible to achieve the devices in flexible form factors. In this regard, this article explains various routes explored for the development of flexible tactile sensing chips.