We report the results of application of combined technology for the manufacturing of metal oxide gas sensors. This technology includes the manufacturing of micromachined thin dielectric membrane with microheater used as a support for thick film metal oxide gas sensing layer. The optimization of geometry of the membrane performed by means of finite-element computer simulation enabled the fabrication of methane gas sensor with power consumption of ~35 mWatt at optimal temperature equal to about 500°C. The microheater and the sensing layer have satisfactory long-term stability.
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