Broadband MST sensor probes based on a SP3T MEMs switch

Modulated scattering techniques (MST) wireless sensors have recently proven their capabilities in different application scenarios. In particular, when the MST sensor antenna is loaded with three different resistive loads by using a suitable electronic switch, it is possible to retrieve the electric characteristics of the surrounding media. The main drawback of MST sensors is the RF switch, because of its cost and narrowband behaviour. The adoption of suitable RF-MEMS microwave switches is a good opportunity to overcome this problem. This work proposes the design and application of an SP3T MEMs switchable to provide good performances up to 20 GHz with reduced dimensions and complexity. An MST sensor prototype able to retrieve the dielectric permittivity of the surrounding media has been designed, fabricated and experimentally assessed. The obtained results were quite promising.