In this work, an approximate function is proposed for describing the deflection of RF-MEMS bridges clamped on two opposite edges in response to quasi-point pressure loads applied by a surface profiler. The deflection law was written as a function of geometric and mechanical properties of the membrane bridge. Used as interpolating function of experimental deflection-load measurements performed in-situ, it allows to indirectly extract residual stress and Young's modulus of the investigated membrane. Multilayer thin film membranes of different sizes and porosities were fabricated by low temperature Plasma Enhanced Chemical Vapor Deposition (PECVD) process using surface micromachining approach. The work discussed in this paper was supported by experimental nanoindentation and stress measurements performed on continuous thin films and by Finite Element Analysis (FEA) using Comsol Multiphysics for modeling the perforated membrane, in agreement with the experimental data.

Fast multi-parametric method for mechanical properties estimation of clamped—clamped perforated membranes

Chiara De Pascali;Alvise Bagolini;
2018-01-01

Abstract

In this work, an approximate function is proposed for describing the deflection of RF-MEMS bridges clamped on two opposite edges in response to quasi-point pressure loads applied by a surface profiler. The deflection law was written as a function of geometric and mechanical properties of the membrane bridge. Used as interpolating function of experimental deflection-load measurements performed in-situ, it allows to indirectly extract residual stress and Young's modulus of the investigated membrane. Multilayer thin film membranes of different sizes and porosities were fabricated by low temperature Plasma Enhanced Chemical Vapor Deposition (PECVD) process using surface micromachining approach. The work discussed in this paper was supported by experimental nanoindentation and stress measurements performed on continuous thin films and by Finite Element Analysis (FEA) using Comsol Multiphysics for modeling the perforated membrane, in agreement with the experimental data.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/317189
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