This paper presents the modeling and simulations of compact multi-band MEMS based LC tank resonator suitable for very low phase-noise VCO. The resonator is based on a high-Q spiral inductor and high capacitive ratio varicap fully integrated in FBK-irst MEMS manufacturing process. The design of the varicap is based on double actuation mechanism with a mechanical central bond that inhibits the pull-in allowing for a theoretically infinite tuning ratio. The measurements show a total capacitance ratio (Cr) of 5.2 with two continuous tuning range with a Cr* = 1.6 and 2.6. The spiral inductor consists of a suspended gold membrane thick 5μm in circular shape. The simulations show that the MEMS based resonator allows for an overall tuning range of 60% in the frequency range 2.15-3.85GHz. Two separate regions of continuous tuning range (9.5% and 30%) allow one to cover the whole frequency spectrum of WiMAX and IEEE802.11a/b/g/n. The simulated quality factor (Q) is about 60. A preliminary design of the MEMS based Voltage Controlled Oscillator (VCO) was performed using Advanced Design System (ADS®). Bonding wire interconnections have been also considered and optimized for improved performance. The VCO prototype is being fabricated on Surface Mount Technology (SMT) on RO4350 laminate.

Widely Tunable MEMS LC Tank for Multi-band applications

A. Cazzorla
;
Flavio Giacomozzi
;
2017

Abstract

This paper presents the modeling and simulations of compact multi-band MEMS based LC tank resonator suitable for very low phase-noise VCO. The resonator is based on a high-Q spiral inductor and high capacitive ratio varicap fully integrated in FBK-irst MEMS manufacturing process. The design of the varicap is based on double actuation mechanism with a mechanical central bond that inhibits the pull-in allowing for a theoretically infinite tuning ratio. The measurements show a total capacitance ratio (Cr) of 5.2 with two continuous tuning range with a Cr* = 1.6 and 2.6. The spiral inductor consists of a suspended gold membrane thick 5μm in circular shape. The simulations show that the MEMS based resonator allows for an overall tuning range of 60% in the frequency range 2.15-3.85GHz. Two separate regions of continuous tuning range (9.5% and 30%) allow one to cover the whole frequency spectrum of WiMAX and IEEE802.11a/b/g/n. The simulated quality factor (Q) is about 60. A preliminary design of the MEMS based Voltage Controlled Oscillator (VCO) was performed using Advanced Design System (ADS®). Bonding wire interconnections have been also considered and optimized for improved performance. The VCO prototype is being fabricated on Surface Mount Technology (SMT) on RO4350 laminate.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/313365
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