Experimental characterization of elastic-plastic behavior of MEMS electroplated gold specimens

This paper presents the design, FEM modeling and experimental characterization of the elastic-plastic behavior of electroplated gold specimens undergoing tensile loading. The test structures are designed and optimized to achieve high stress values in the double-clamped specimen with a rectangular cross-section in the middle of the test structure. High stresses in the specimen are achieved by using electrostatic actuation to the plates, constrained using hinges. The range of electrostatic actuation is increased using bottom partial-plate electrodes on the substrate. The static deflection of the central specimen in the test structures under multiple loading cycles is obtained using experimental characterization and a change in the static pull-in voltage with each loading cycle is observed evaluating the permanent strain due to plasticity.