This work presents the design of three K-band 5-bit MEMS phase shifters for Phased Array Antennas. The three devices work at 20.7GHz, 30.5GHz and 35GHz respectively. They have been designed in microstrip technology using RF-MEMS Cantilever switches. The full wave simulations of the phase shifters show excellent performance in the frequency bands of interest (20.2-21.2 GHz, 30-35GHz and 33.9-36.1 GHz). Return Loss and Insertion Loss better than 20 dB and 2.5 dB and phase error minor than 1 degree are obtained for all the 2^5 states of all the phase shifters. The phase shifters are being manufactured on 200 μm thick high resistivity silicon substrate by using the well-established FBK MEMS process [7]
Design of mm-wave 5-bit phase shifters for Phased Array Antenna Systems
Margesin, Benno;
2010-01-01
Abstract
This work presents the design of three K-band 5-bit MEMS phase shifters for Phased Array Antennas. The three devices work at 20.7GHz, 30.5GHz and 35GHz respectively. They have been designed in microstrip technology using RF-MEMS Cantilever switches. The full wave simulations of the phase shifters show excellent performance in the frequency bands of interest (20.2-21.2 GHz, 30-35GHz and 33.9-36.1 GHz). Return Loss and Insertion Loss better than 20 dB and 2.5 dB and phase error minor than 1 degree are obtained for all the 2^5 states of all the phase shifters. The phase shifters are being manufactured on 200 μm thick high resistivity silicon substrate by using the well-established FBK MEMS process [7]I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
