We hereby discuss effects and consequences of using certain measurements approaches on the charge trap analysis of RF-MEMS switches during cycling tests. We analyze how measurements are affected when the shape of the pulse changes, when the cycling frequency decrease and when measurements are carried out as a function of temperature. The trends here shown have to be taken into account when devices, that suffer of severe charge trapping phenomena like those used in the following experiments, are considered. The real goal in fact, is to fully characterize the real nature of the devices separating the effect that different measurements analysis have on the device itself.
Charge trap investigation methodology on RF MEMS Switches
Margesin, Benno;
2011-01-01
Abstract
We hereby discuss effects and consequences of using certain measurements approaches on the charge trap analysis of RF-MEMS switches during cycling tests. We analyze how measurements are affected when the shape of the pulse changes, when the cycling frequency decrease and when measurements are carried out as a function of temperature. The trends here shown have to be taken into account when devices, that suffer of severe charge trapping phenomena like those used in the following experiments, are considered. The real goal in fact, is to fully characterize the real nature of the devices separating the effect that different measurements analysis have on the device itself.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
