The paradigm of the Internet of Things (IoT) has emerged as a main driving force, stimulating research and development of pervasive, integrated, heterogeneous and power autonomous wireless sensing nodes. In this work, we focus on the aspect of energy, by discussing a novel MEMS based Energy Harvester (i.e. EH-MEMS) design concept, aimed to convert environmental vibrations' energy through the piezoelectric effect. The characterized physical samples, based on toggle mechanical resonator concept, provided up to 396 nW (Root Mean Square — RMS power) at resonance (∼1.6 kHz) when stimulated with 1.3 g sinusoidal acceleration, at ambient pressure and with 1 MΩ load. Thanks to the reduced EH-MEMS volume (1.94 mm3), Normalized Power Density (NPD) figures of about 240 μW/g2/cm3 are achieved.

A Novel Toggle-Type MEMS Vibration Energy Harvester for Internet of Things Applications

Iannacci, Jacopo;Sordo, Guido;
2016

Abstract

The paradigm of the Internet of Things (IoT) has emerged as a main driving force, stimulating research and development of pervasive, integrated, heterogeneous and power autonomous wireless sensing nodes. In this work, we focus on the aspect of energy, by discussing a novel MEMS based Energy Harvester (i.e. EH-MEMS) design concept, aimed to convert environmental vibrations' energy through the piezoelectric effect. The characterized physical samples, based on toggle mechanical resonator concept, provided up to 396 nW (Root Mean Square — RMS power) at resonance (∼1.6 kHz) when stimulated with 1.3 g sinusoidal acceleration, at ambient pressure and with 1 MΩ load. Thanks to the reduced EH-MEMS volume (1.94 mm3), Normalized Power Density (NPD) figures of about 240 μW/g2/cm3 are achieved.
978-1-4799-8287-5
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/308668
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