The paradigm of the Internet of Things (IoT) has emerged as a main driving force, stimulating research and development of pervasive, integrated, heterogeneous and power autonomous wireless sensing nodes. In this work, we focus on the aspect of energy, by discussing a novel MEMS based Energy Harvester (i.e. EH-MEMS) design concept, aimed to convert environmental vibrations' energy through the piezoelectric effect. The characterized physical samples, based on toggle mechanical resonator concept, provided up to 396 nW (Root Mean Square — RMS power) at resonance (∼1.6 kHz) when stimulated with 1.3 g sinusoidal acceleration, at ambient pressure and with 1 MΩ load. Thanks to the reduced EH-MEMS volume (1.94 mm3), Normalized Power Density (NPD) figures of about 240 μW/g2/cm3 are achieved.
A Novel Toggle-Type MEMS Vibration Energy Harvester for Internet of Things Applications
Iannacci, Jacopo;Sordo, Guido;
2016-01-01
Abstract
The paradigm of the Internet of Things (IoT) has emerged as a main driving force, stimulating research and development of pervasive, integrated, heterogeneous and power autonomous wireless sensing nodes. In this work, we focus on the aspect of energy, by discussing a novel MEMS based Energy Harvester (i.e. EH-MEMS) design concept, aimed to convert environmental vibrations' energy through the piezoelectric effect. The characterized physical samples, based on toggle mechanical resonator concept, provided up to 396 nW (Root Mean Square — RMS power) at resonance (∼1.6 kHz) when stimulated with 1.3 g sinusoidal acceleration, at ambient pressure and with 1 MΩ load. Thanks to the reduced EH-MEMS volume (1.94 mm3), Normalized Power Density (NPD) figures of about 240 μW/g2/cm3 are achieved.| File | Dimensione | Formato | |
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