In this paper the transient behaviour of ohmic RF-MEMS switches will be investigated by both experimental and simulation means. The devices are based on a suspended gold membrane and vertical electrostatic transduction, with gold ohmic contacts along the RF signal path. Dynamic RF measurements are performed by using a power detector to monitor opening and closing transitions of both series and shunt switches. Compact models of the fabricated devices are also implemented in Cadence® through a developed MEMS model library based on modified nodal analysis. Pull-in voltage, actuation and release transition time have been observed and compared, achieving a better understanding of squeeze-film damping effect.
Radiofrequency Transient Behaviour Of Ohmic Rf-Mems Switches
Iannacci, Jacopo;Bellei, Marco;Margesin, Benno;Giacomozzi, Flavio
2008-01-01
Abstract
In this paper the transient behaviour of ohmic RF-MEMS switches will be investigated by both experimental and simulation means. The devices are based on a suspended gold membrane and vertical electrostatic transduction, with gold ohmic contacts along the RF signal path. Dynamic RF measurements are performed by using a power detector to monitor opening and closing transitions of both series and shunt switches. Compact models of the fabricated devices are also implemented in Cadence® through a developed MEMS model library based on modified nodal analysis. Pull-in voltage, actuation and release transition time have been observed and compared, achieving a better understanding of squeeze-film damping effect.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
