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EnglishAn improved model for the electrostatic vertical transducer is developed within a MEMS library implemented in SpectreHDL language, within the Cadence design framework. Following a modified nodal analysis modelling approach, a rigid conductor plate model with underlying substrate electrode is extended from 4 to 6 degrees of freedom. Uneven charge and field distribution and fringing effects, which are typical in MEMS devices such as variable capacitors and RF-switches, are fully accounted for. Coupled electro-mechanical finite element method simulations are used as a validation tool on a principle test structure. Developed models have been applied to the design of complex RF-MEMS devices through static, small-signal and transient simulations.
| Titolo: | Nodal Modelling of Uneven Electrostatic Transduction in MEMS | |
| Autori: | ||
| Data di pubblicazione: | 2004 | |
| Abstract: | An improved model for the electrostatic vertical transducer is developed within a MEMS library implemented in SpectreHDL language, within the Cadence design framework. Following a modified nodal analysis modelling approach, a rigid conductor plate model with underlying substrate electrode is extended from 4 to 6 degrees of freedom. Uneven charge and field distribution and fringing effects, which are typical in MEMS devices such as variable capacitors and RF-switches, are fully accounted for. Coupled electro-mechanical finite element method simulations are used as a validation tool on a principle test structure. Developed models have been applied to the design of complex RF-MEMS devices through static, small-signal and transient simulations. | |
| Handle: | http://hdl.handle.net/11582/300122 | |
| ISBN: | 981-256-386-5 | |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
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http://hdl.handle.net/11582/300122
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