An improved model for the electrostatic vertical transducer is developed within a MEMS library implemented in SpectreHDL language, within the Cadence design framework. Following a modified nodal analysis modelling approach, a rigid conductor plate model with underlying substrate electrode is extended from 4 to 6 degrees of freedom. Uneven charge and field distribution and fringing effects, which are typical in MEMS devices such as variable capacitors and RF-switches, are fully accounted for. Coupled electro-mechanical finite element method simulations are used as a validation tool on a principle test structure. Developed models have been applied to the design of complex RF-MEMS devices through static, small-signal and transient simulations.
Nodal Modelling of Uneven Electrostatic Transduction in MEMS
Iannacci, Jacopo;
2004-01-01
Abstract
An improved model for the electrostatic vertical transducer is developed within a MEMS library implemented in SpectreHDL language, within the Cadence design framework. Following a modified nodal analysis modelling approach, a rigid conductor plate model with underlying substrate electrode is extended from 4 to 6 degrees of freedom. Uneven charge and field distribution and fringing effects, which are typical in MEMS devices such as variable capacitors and RF-switches, are fully accounted for. Coupled electro-mechanical finite element method simulations are used as a validation tool on a principle test structure. Developed models have been applied to the design of complex RF-MEMS devices through static, small-signal and transient simulations.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
