A compact model of vertical electrostatic transducer plate is implemented following a modified nodal analysis approach. The plate can assume any orientation in space with uneven charge distribution taken into account through geometric integration approach. The model is implemented in HDL language within a MEMS model library previously developed by the Authors in the Spectre-Cadence simulation environment. Through this modeling tool a complex structure of a MEMS toggle-switch is simulated, both statically and dynamically, with considerable saving in analysis time and little loss in accuracy.
Compact modeling of a MEMS toggle-switch based on modified nodal analysis
Iannacci, Jacopo;
2005
Abstract
A compact model of vertical electrostatic transducer plate is implemented following a modified nodal analysis approach. The plate can assume any orientation in space with uneven charge distribution taken into account through geometric integration approach. The model is implemented in HDL language within a MEMS model library previously developed by the Authors in the Spectre-Cadence simulation environment. Through this modeling tool a complex structure of a MEMS toggle-switch is simulated, both statically and dynamically, with considerable saving in analysis time and little loss in accuracy.File in questo prodotto:
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