The aim of this work is to present the main technological developments carried out at FBK for micro machined radiation sensors used in High Energy Physics (HEP) experiments. We report on the main technological issues to integrate silicon etching (wet and dry) techniques in the fabrication flow for silicon detector and we show some examples of innovative detectors realized by means of these technologies.

Micromachined Silicon Radiation Sensors – Part 2: Fabrication Technologies

Bagolini, Alvise;Boscardin, Maurizio;Conci, Paolo;Crivellari, Michele;Giacomini, Gabriele;Mattedi, Francesca;Piemonte, Claudio;Ronchin, Sabina;Zorzi, Nicola;Dalla Betta, Gian Franco;R. Mendicino;Pancheri, Lucio;Povoli, Marco;
2015

Abstract

The aim of this work is to present the main technological developments carried out at FBK for micro machined radiation sensors used in High Energy Physics (HEP) experiments. We report on the main technological issues to integrate silicon etching (wet and dry) techniques in the fabrication flow for silicon detector and we show some examples of innovative detectors realized by means of these technologies.
9781479985913
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/277024
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