The aim of this work is to present the main technological developments carried out at FBK for micro machined radiation sensors used in High Energy Physics (HEP) experiments. We report on the main technological issues to integrate silicon etching (wet and dry) techniques in the fabrication flow for silicon detector and we show some examples of innovative detectors realized by means of these technologies.
Micromachined Silicon Radiation Sensors – Part 2: Fabrication Technologies
Bagolini, Alvise;Boscardin, Maurizio;Conci, Paolo;Crivellari, Michele;Giacomini, Gabriele;Mattedi, Francesca;Piemonte, Claudio;Ronchin, Sabina;Zorzi, Nicola;Dalla Betta, Gian Franco;R. Mendicino;Pancheri, Lucio;Povoli, Marco;
2015-01-01
Abstract
The aim of this work is to present the main technological developments carried out at FBK for micro machined radiation sensors used in High Energy Physics (HEP) experiments. We report on the main technological issues to integrate silicon etching (wet and dry) techniques in the fabrication flow for silicon detector and we show some examples of innovative detectors realized by means of these technologies.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
