Silicon radiation sensors fabricated with micromachining technologies offer a number of advantages compared to their planar counterparts, making them appealing for an increasing number of applications. This paper provides an overview of the most interesting developments in this field by Fondazione Bruno Kessler in collaboration with the University of Trento.

Micromachined Silicon Radiation Sensors – Part 1: Design And Experimental Characterization

Bagolini, Alvise;Boscardin, Maurizio;Conci, Paolo;Crivellari, Michele;Giacomini, Gabriele;Mattedi, Francesca;Piemonte, Claudio;Ronchin, Sabina;Zorzi, Nicola;Dalla Betta, Gian Franco;R. Mendicino;Pancheri, Lucio;Povoli, Marco;
2015

Abstract

Silicon radiation sensors fabricated with micromachining technologies offer a number of advantages compared to their planar counterparts, making them appealing for an increasing number of applications. This paper provides an overview of the most interesting developments in this field by Fondazione Bruno Kessler in collaboration with the University of Trento.
9781479985913
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11582/277023
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