Long-term switch reliability is one of the issues that so far prevented the widespread use of RF-MEMS switches. In this paper a detailed analysis of long-term actuation properties of a MEMS capacitive switch is presented, together with a framework for the data interpretation and for failure time prediction.Due to the lack of a solid theoretical background, the modeling function is however not univocal, and this leads to a wide interval of possible lifetimes. However, also in the worst case examined, the predicted device lifetime is at least of the order of several years.
Long-term reliability of RF-MEMS dielectric-less capacitive switches
Mulloni, Viviana;Giacomozzi, Flavio;Resta, Giuseppe;Margesin, Benno
2014-01-01
Abstract
Long-term switch reliability is one of the issues that so far prevented the widespread use of RF-MEMS switches. In this paper a detailed analysis of long-term actuation properties of a MEMS capacitive switch is presented, together with a framework for the data interpretation and for failure time prediction.Due to the lack of a solid theoretical background, the modeling function is however not univocal, and this leads to a wide interval of possible lifetimes. However, also in the worst case examined, the predicted device lifetime is at least of the order of several years.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.