CINECA IRIS Institutional Research Information System
IRIS è l’archivio della produzione scientifica della Fondazione Bruno Kessler.
EnglishSilicon resonators are widely used in a large class of applications including sensing and actuation, signal processing and energy harvesting. Very often, their application as sensors requires the deposition of metallic thin films or dielectric coatings, to set the electrical conductivity, the optical coupling, or other physical-chemical properties of the device. Invariably coatings degrade the quality factor (Q) of resonance by increasing the amount of energy dissipated during vibration. In this paper, we show a class of resonators used for the investigation of thermal noise statistical properties in non-thermodynamic equilibrium. Design strategies to preserve the silicon Q-factor are discussed.
Scheda prodotto non validato
Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte di FBK.
| Titolo: | Selective coating deposition on high-Q single-crystal silicon resonators for the investigation of thermal noise statistical properties | |
| Autori: | ||
| Data di pubblicazione: | 2014 | |
| Abstract: | Silicon resonators are widely used in a large class of applications including sensing and actuation, signal processing and energy harvesting. Very often, their application as sensors requires the deposition of metallic thin films or dielectric coatings, to set the electrical conductivity, the optical coupling, or other physical-chemical properties of the device. Invariably coatings degrade the quality factor (Q) of resonance by increasing the amount of energy dissipated during vibration. In this paper, we show a class of resonators used for the investigation of thermal noise statistical properties in non-thermodynamic equilibrium. Design strategies to preserve the silicon Q-factor are discussed. | |
| Handle: | http://hdl.handle.net/11582/235020 | |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
File in questo prodotto:
http://hdl.handle.net/11582/235020
Copyright © 2021