In this presentation we compare the advantages of two technologies, which could be used for the fabrication of low-power consumption gas sensors used for portable and autonomous instruments. New approach to the preparation of these devices, that is Thin Alumina Film (TAF) membranes is advantageous for middle scale production of sensors, and, on the other hand, provides a tool for the manufacturing of a microhotplate compatible with existing screen-printing technology of gas sensor fabrication. The main disadvantage of this technique is higher power consumption compared to silicon oxide/nitride membranes.
Gas Sensor Microhotplate Technology: Silicon Oxide/Nitride or Thin Alumina Film (TAF)
Guarnieri, Vittorio;Zen, Mario;Margesin, Benno;Soncini, Giovanni;
2004-01-01
Abstract
In this presentation we compare the advantages of two technologies, which could be used for the fabrication of low-power consumption gas sensors used for portable and autonomous instruments. New approach to the preparation of these devices, that is Thin Alumina Film (TAF) membranes is advantageous for middle scale production of sensors, and, on the other hand, provides a tool for the manufacturing of a microhotplate compatible with existing screen-printing technology of gas sensor fabrication. The main disadvantage of this technique is higher power consumption compared to silicon oxide/nitride membranes.File in questo prodotto:
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