In this paper we present the design, fabrication and electromechanical characterization of low actuation voltage RF MEMS switches for high frequency applications. The switch design is based on folded suspension beams with spring constant 0.5 to 4N/mt and measured actuation voltage as low as 8 volts. The measured C-V characteristics show good agreement with the designed down capacitance, while the higher values for up-capacitance are attributed to the non-uniform deformation of the perforated 1.5-1.7mm thick and 600-1050 mm long beams. The simulation results for the modified design (in fabrication), with selected portions of the bridge in four micron thick gold and lower mass are also presented
On Electromechanical Performance of Low Actuation Voltage RF-MEMS Switches
Rangra, Kamaljit;Lorenzelli, Leandro;Collini, Cristian;Margesin, Benno;Giacomozzi, Flavio;Soncini, Giovanni
2004-01-01
Abstract
In this paper we present the design, fabrication and electromechanical characterization of low actuation voltage RF MEMS switches for high frequency applications. The switch design is based on folded suspension beams with spring constant 0.5 to 4N/mt and measured actuation voltage as low as 8 volts. The measured C-V characteristics show good agreement with the designed down capacitance, while the higher values for up-capacitance are attributed to the non-uniform deformation of the perforated 1.5-1.7mm thick and 600-1050 mm long beams. The simulation results for the modified design (in fabrication), with selected portions of the bridge in four micron thick gold and lower mass are also presentedI documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
