In this paper we report the realization and characterization of low-loss, capacitive RF MEMS switches that utilize folded serpentine spring suspensions with large area actuation electrodes. The surface micromachined switches with 1.7 um thick electroplated gold beams, are implemented in standard 50 ohm CPW configuration. The electromechanical characterization indicates the measured actuation voltages in the range of 8-15 volts. The RF measurements of devices, give insertion loss of 0.24 dB and isolation better than 21 dB at 20 GHz. The capacitance ratio extracted from measured s-parameters is 26
Micromachined Low Actuation Voltage RF MEMS Capacitive Switches - Technology and Characterization
Rangra, Kamaljit;Giacomozzi, Flavio;Margesin, Benno;Lorenzelli, Leandro;Mulloni, Viviana;Collini, Cristian;Soncini, Giovanni
2004-01-01
Abstract
In this paper we report the realization and characterization of low-loss, capacitive RF MEMS switches that utilize folded serpentine spring suspensions with large area actuation electrodes. The surface micromachined switches with 1.7 um thick electroplated gold beams, are implemented in standard 50 ohm CPW configuration. The electromechanical characterization indicates the measured actuation voltages in the range of 8-15 volts. The RF measurements of devices, give insertion loss of 0.24 dB and isolation better than 21 dB at 20 GHz. The capacitance ratio extracted from measured s-parameters is 26File in questo prodotto:
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