Micromachined MEMS switches for microwave applications have been manufactured, tested and modelled. A series, coplanar waveguide (CPW) configuration has been studied, suitable of better performances with respect to the shunt one for high frequences. A phenomenological circuital model is salso proposed to account for the contributions coming from: (i) metal-to-metal contacts, (ii) residual oxide in the switch actuation region
Microwave MEMS Switches in Series Configuration: Technology and Circuital Modeling
Giacomozzi, Flavio;Margesin, Benno;
2004-01-01
Abstract
Micromachined MEMS switches for microwave applications have been manufactured, tested and modelled. A series, coplanar waveguide (CPW) configuration has been studied, suitable of better performances with respect to the shunt one for high frequences. A phenomenological circuital model is salso proposed to account for the contributions coming from: (i) metal-to-metal contacts, (ii) residual oxide in the switch actuation regionFile in questo prodotto:
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