Microelectromechanical (MEMS) switches have been recently considered as alternative key elements with respect to PIN diode switches for high frequency applications. In spite of many configurations proposed in literature, a full theoretical modeling of the MEM switches is still in progress by using numerical and analytical approaches. In this paper, a phenomenological modeling of a classical MEM switch configuration is presented, to describe the microwave performances resulting from this mechanical device
Phenomenological modeling of MEMS switches for microwave applications
Margesin, Benno;Giacomozzi, Flavio
2004-01-01
Abstract
Microelectromechanical (MEMS) switches have been recently considered as alternative key elements with respect to PIN diode switches for high frequency applications. In spite of many configurations proposed in literature, a full theoretical modeling of the MEM switches is still in progress by using numerical and analytical approaches. In this paper, a phenomenological modeling of a classical MEM switch configuration is presented, to describe the microwave performances resulting from this mechanical deviceFile in questo prodotto:
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