Microelectromechanical (MEMS) switches have been recently considered as alternative key elements with respect to PIN diode switches for high frequency applications. In spite of many configurations proposed in literature, a full theoretical modeling of the MEM switches is still in progress by using numerical and analytical approaches. In this paper, a phenomenological modeling of a classical MEM switch configuration is presented, to describe the microwave performances resulting from this mechanical device

Phenomenological modeling of MEMS switches for microwave applications

Margesin, Benno;Giacomozzi, Flavio
2004-01-01

Abstract

Microelectromechanical (MEMS) switches have been recently considered as alternative key elements with respect to PIN diode switches for high frequency applications. In spite of many configurations proposed in literature, a full theoretical modeling of the MEM switches is still in progress by using numerical and analytical approaches. In this paper, a phenomenological modeling of a classical MEM switch configuration is presented, to describe the microwave performances resulting from this mechanical device
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/2120
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