This work analyzes the main aspects related to long term electro-mechanical measurements on RF MEMS switches fabricated for DC to 30GHz; the fabrication process, design, and adopted experimental procedures have been also described in details. Particular attention has been dedicated to the stress effect for studies to different behavior due to applied electric field
Quasi-static C-V measurements on RF MEMS test structures
Lorenzelli, Leandro;Margesin, Benno;Collini, Cristian;Rangra, Kamaljit
2004-01-01
Abstract
This work analyzes the main aspects related to long term electro-mechanical measurements on RF MEMS switches fabricated for DC to 30GHz; the fabrication process, design, and adopted experimental procedures have been also described in details. Particular attention has been dedicated to the stress effect for studies to different behavior due to applied electric fieldFile in questo prodotto:
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