In the last years there was an increasing interest in micromachined RF switches, mainly in the communication and space industries. This article describes a fabrication process used for the development of electrostatically actuated MEMS RF switches operating in the 2-40 GHz range. Results of the RF characteristic measurements of single switches are presented and possible improvements are discussed

MEMS Technology for RF Switches

Giacomozzi, Flavio;Lorenzelli, Leandro;Margesin, Benno;
2004

Abstract

In the last years there was an increasing interest in micromachined RF switches, mainly in the communication and space industries. This article describes a fabrication process used for the development of electrostatically actuated MEMS RF switches operating in the 2-40 GHz range. Results of the RF characteristic measurements of single switches are presented and possible improvements are discussed
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11582/2117
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