This work presents the development of a fabrication technology for a silicon-based microcolumn for gas chromatographic measurements. The system consists of two main components: i) the silicon wafer micromachined separataion capillary column and ii) the metal oxide semiconductor detector made on silicon membrane. The final goal will be to realize low cost and portable miniaturized system expressly designed for the detection of infant neuroblastoma tumor. In this preliminary work both simulation and technological aspects have been considered for the fabrication. The microcolumn design has been erformed in order to optimize the separationfactor. Silicon micromachining techniques have been applied to the fabrication of the device
Silicon Gas Chromatographic Microcolumn for Biomedical Applications
Lorenzelli, Leandro;Guarnieri, Vittorio;Margesin, Benno;
2004-01-01
Abstract
This work presents the development of a fabrication technology for a silicon-based microcolumn for gas chromatographic measurements. The system consists of two main components: i) the silicon wafer micromachined separataion capillary column and ii) the metal oxide semiconductor detector made on silicon membrane. The final goal will be to realize low cost and portable miniaturized system expressly designed for the detection of infant neuroblastoma tumor. In this preliminary work both simulation and technological aspects have been considered for the fabrication. The microcolumn design has been erformed in order to optimize the separationfactor. Silicon micromachining techniques have been applied to the fabrication of the deviceI documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
