The dynamic pull-in and pull-out of an electrostatically actuated and viscously damped ohmic contact RF-MEMS switch is both measured and simulated. Three different models are used for the simulations and evaluated w.r.t. measurements performed with a white light interferometer and a laser vibrometer. The evaluation shows that all models fail in predicting the initial contact phase of the membrane correctly. Further analysis reveals that this is due to the presence of a higher eigenmode that is activated during the first impact of the membrane.

Experimental Analysis and Modeling of the Mechanical Impact during the Dynamic Pull-In of RF-MEMS Switches

Iannacci, Jacopo;
2010

Abstract

The dynamic pull-in and pull-out of an electrostatically actuated and viscously damped ohmic contact RF-MEMS switch is both measured and simulated. Three different models are used for the simulations and evaluated w.r.t. measurements performed with a white light interferometer and a laser vibrometer. The evaluation shows that all models fail in predicting the initial contact phase of the membrane correctly. Further analysis reveals that this is due to the presence of a higher eigenmode that is activated during the first impact of the membrane.
9781424485734
File in questo prodotto:
File Dimensione Formato  
267-270.pdf

non disponibili

Tipologia: Documento in Post-print
Licenza: NON PUBBLICO - Accesso privato/ristretto
Dimensione 179.26 kB
Formato Adobe PDF
179.26 kB Adobe PDF   Visualizza/Apri   Richiedi una copia

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11582/18669
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
social impact