MIM capacitors made by the same structures and materials commonly used for the actuation of RF MEMS switches have been systematically investigated, to get information about the charging effects induced by the actuation pads.
Characterization of MIM Capacitors for the Investigation of RF MEMS Switch Charging Effects
Giacomozzi, Flavio;Margesin, Benno;
2009-01-01
Abstract
MIM capacitors made by the same structures and materials commonly used for the actuation of RF MEMS switches have been systematically investigated, to get information about the charging effects induced by the actuation pads.File in questo prodotto:
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