MIM capacitors made by the same structures and materials commonly used for the actuation of RF MEMS switches have been systematically investigated, to get information about the charging effects induced by the actuation pads.

Characterization of MIM Capacitors for the Investigation of RF MEMS Switch Charging Effects

Giacomozzi, Flavio;Margesin, Benno;
2009-01-01

Abstract

MIM capacitors made by the same structures and materials commonly used for the actuation of RF MEMS switches have been systematically investigated, to get information about the charging effects induced by the actuation pads.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/18309
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