The significative technological contribute provided by capacitive MicroElectroMechanical SystemRadio Frequency (MEMS RF) switches has to be accompanied with state–of–the–art methodologies for accurate measurements of their performances. In this paper, after a brief review on the design of a MEMS switch, a test bench for testing its time domain and reliability features is proposed.
TIME CHARACTERIZATION OF CAPACITIVE MEMS RF SWITCHES
Soncini, Giovanni;Giacomozzi, Flavio;Lorenzelli, Leandro;Margesin, Benno;
2004-01-01
Abstract
The significative technological contribute provided by capacitive MicroElectroMechanical SystemRadio Frequency (MEMS RF) switches has to be accompanied with state–of–the–art methodologies for accurate measurements of their performances. In this paper, after a brief review on the design of a MEMS switch, a test bench for testing its time domain and reliability features is proposed.File in questo prodotto:
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