A broadband 0º/180º phase switch based on a slotline-coplanar-waveguide cross loaded with two MEMS switches in opposed (ON/OFF or OFF/ON) states, is reported. The fabrication was made on high-resistivity silicon substrates using the FBK-irst and LAAS-CNRS surface micromachining processes, showing a high repeatability. The measured phase shift is 180º +0º/-7º in the extremely wide frequency range 1–30 GHz.
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