Innovative hydrogen sensors based on Kelvin Probe operation principle and on MEMS technology have been designed and fabricated, on the basis of a previous study and process dedicated to the manufacture of electro-statically actuated RF MEMS capacitive switches. Many factors can influence the work function difference, including adsorption or desorption of volatile compound molecules depending on the sample material. The innivation proposed consists in a mobile Au plate, as a gas chemical sensor to monitor the concentration of hydrogen over time with very high accuracy by detecting changes in the work function difference balance condition.

DESIGN AND FABRICATION OF A KELVIN PROBE-BASED MEMS HYDROGEN SENSOR

Tibuzzi, Arianna;Margesin, Benno;Giacomozzi, Flavio;Soncini, Giovanni;
2008

Abstract

Innovative hydrogen sensors based on Kelvin Probe operation principle and on MEMS technology have been designed and fabricated, on the basis of a previous study and process dedicated to the manufacture of electro-statically actuated RF MEMS capacitive switches. Many factors can influence the work function difference, including adsorption or desorption of volatile compound molecules depending on the sample material. The innivation proposed consists in a mobile Au plate, as a gas chemical sensor to monitor the concentration of hydrogen over time with very high accuracy by detecting changes in the work function difference balance condition.
9789812835970
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/17910
 Attenzione

Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte dell'ateneo

Citazioni
  • ???jsp.display-item.citation.pmc??? ND
social impact