The paper investigates the charging processes in RF-MEMS capacitive switches. Two basic mechanisms the injected charge and the dipoles orientation give rise to charging of opposite polarities. The transition from ON to OFF state gives rise to capacitance transient which shape and polarity depends directly on the discharging process. The application of appropriate bias and operating temperature allows the discrimination of these processes.
Charging Processes in RF-MEMS Capacitive Switches with SiO2 Dielectric
Giacomozzi, Flavio;Margesin, Benno
2008-01-01
Abstract
The paper investigates the charging processes in RF-MEMS capacitive switches. Two basic mechanisms the injected charge and the dipoles orientation give rise to charging of opposite polarities. The transition from ON to OFF state gives rise to capacitance transient which shape and polarity depends directly on the discharging process. The application of appropriate bias and operating temperature allows the discrimination of these processes.File in questo prodotto:
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