This contribution presents an optimization strategy for the mechanical and geometrical characteristics of clamped-clamped RF-MEMS switches in order to enhance their reliability performances both in terms of switch properties control and long-term stress actuation tests. Experimental measurements demonstrated that the optimized version of the capacitive switch investigated shows an improved resistance to high bias voltage, while the optimized ohmic switch shows a lower and more reproducible contact resistance.

RF-MEMS switch design optimization for long-term reliability

Mulloni, Viviana;Solazzi, Francesco;Resta, Giuseppe;Giacomozzi, Flavio;Margesin, Benno
2013

Abstract

This contribution presents an optimization strategy for the mechanical and geometrical characteristics of clamped-clamped RF-MEMS switches in order to enhance their reliability performances both in terms of switch properties control and long-term stress actuation tests. Experimental measurements demonstrated that the optimized version of the capacitive switch investigated shows an improved resistance to high bias voltage, while the optimized ohmic switch shows a lower and more reproducible contact resistance.
9782355000256
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11582/165010
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