CINECA IRIS Institutional Research Information System
IRIS è l’archivio della produzione scientifica della Fondazione Bruno Kessler.
EnglishThis contribution presents an optimization strategy for the mechanical and geometrical characteristics of clamped-clamped RF-MEMS switches in order to enhance their reliability performances both in terms of switch properties control and long-term stress actuation tests. Experimental measurements demonstrated that the optimized version of the capacitive switch investigated shows an improved resistance to high bias voltage, while the optimized ohmic switch shows a lower and more reproducible contact resistance.
Scheda prodotto non validato
Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte di FBK.
| Titolo: | RF-MEMS switch design optimization for long-term reliability | |
| Autori: | ||
| Data di pubblicazione: | 2013 | |
| Abstract: | This contribution presents an optimization strategy for the mechanical and geometrical characteristics of clamped-clamped RF-MEMS switches in order to enhance their reliability performances both in terms of switch properties control and long-term stress actuation tests. Experimental measurements demonstrated that the optimized version of the capacitive switch investigated shows an improved resistance to high bias voltage, while the optimized ohmic switch shows a lower and more reproducible contact resistance. | |
| Handle: | http://hdl.handle.net/11582/165010 | |
| ISBN: | 9782355000256 | |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
File in questo prodotto:
Non ci sono file associati a questo prodotto.
Utilizza questo identificativo per citare o creare un link a questo documento:
http://hdl.handle.net/11582/165010
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
Copyright © 2021