This contribution presents an optimization strategy for the mechanical and geometrical characteristics of clamped-clamped RF-MEMS switches in order to enhance their reliability performances both in terms of switch properties control and long-term stress actuation tests. Experimental measurements demonstrated that the optimized version of the capacitive switch investigated shows an improved resistance to high bias voltage, while the optimized ohmic switch shows a lower and more reproducible contact resistance.
RF-MEMS switch design optimization for long-term reliability
Mulloni, Viviana;Solazzi, Francesco;Resta, Giuseppe;Giacomozzi, Flavio;Margesin, Benno
2013
Abstract
This contribution presents an optimization strategy for the mechanical and geometrical characteristics of clamped-clamped RF-MEMS switches in order to enhance their reliability performances both in terms of switch properties control and long-term stress actuation tests. Experimental measurements demonstrated that the optimized version of the capacitive switch investigated shows an improved resistance to high bias voltage, while the optimized ohmic switch shows a lower and more reproducible contact resistance.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
